Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate
2005-08-23
2008-07-08
Ahmed, Shamim (Department: 1792)
Etching a substrate: processes
Gas phase etching of substrate
With measuring, testing, or inspecting
C216S060000, C216S067000, C438S706000, C438S710000, C438S725000
Reexamination Certificate
active
07396481
ABSTRACT:
This invention relates to a method for etching an organic insulating film used in the production of semiconductor devices. A sample to be etched on which a low dielectric constant organic insulating film is formed is etched by generating a plasma from hydrogen gas and nitrogen gas or ammonia gas, and controlling the gas flow rate and pressure so that the light emission spectral intensity ratio of hydrogen atom and cyan molecule in the plasma comes to a prescribed value. By this method, a low dielectric constant organic insulating film as an insulating film between layers can be etched without using any etch stop layer so that bottom surfaces of trenches and holes for electrical wiring become flat.
REFERENCES:
patent: 6080529 (2000-06-01), Ye
patent: 6548416 (2003-04-01), Han
patent: 6617244 (2003-09-01), Nishizawa
patent: 08 330278 (1996-12-01), None
patent: 9-186134 (1997-07-01), None
patent: 10-335308 (1998-12-01), None
patent: 2000-252359 (2000-09-01), None
patent: 0115213 (2001-01-01), None
patent: 2001-176853 (2001-06-01), None
patent: 2001-335932 (2001-12-01), None
patent: 2001-338909 (2001-12-01), None
Fukuyama Ryooji
Mizumura Michinobu
Ohmoto Yutaka
Watanabe Katsuya
LandOfFree
Etching method of organic insulating film does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Etching method of organic insulating film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Etching method of organic insulating film will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3973687