4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Yutaka Ohmoto

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Apparatus and method for plasma processing high-speed...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Apparatus and method for plasma processing high-speed...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Etching aftertreatment method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Etching method of organic insulating film

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Etching method of organic insulating film

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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