Error reduction in semiconductor processes

Details Error reduction in semiconductor processes Error reduction in semiconductor processes

2005-01-25

2005-01-25

Chung, Phung My (Department: 2133)

Error detection/correction and fault detection/recovery

Pulse or data error handling

Digital logic testing

C430S030000

Reexamination Certificate

active

06848066

ABSTRACT:
A photolithography system includes a photolithography tool32that includes a stage upon which a semiconductor wafer is mounted. The tool is operable to move the stage to automatically focus a pre-determined image on a surface of the semiconductor wafer. The tool is further operable to log movements of the stage. The system also includes an automation host computer36operable to poll the photolithography tool32to obtain data reflecting the logged movements of the stage. The automation host computer36is further operable to analyze the data and compare the data to pre-determined error conditions. The host computer also takes a pre-determined action, including sending an electronic mail message to the personal computers38of relevant line personnel, in the event the data meets the pre-determined error conditions.

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