Ellipsometer

Details Ellipsometer Ellipsometer

2005-05-24

2005-05-24

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S367000

Reexamination Certificate

active

06897955

ABSTRACT:
This invention concerns an ellipsometer for the examination of a sample whereby the ellipsometer has a broadband light source on the emitter side and a detector on the receiver side for a receiver light beam reflected from the sample. A refractive optic for the generation of a measuring spot on the sample and an aperture arranged on the emitter side for the definition of a measuring spot on the sample. The spectroscopic ellipsometer of the present invention makes it possible to easily produce a precisely defined measuring spot on the sample.

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English translation of International Preliminary Examination Report of corresponding PCT/DE01/01807, dated Oct. 15, 2002.

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