Electrostatic chuck with polymeric impregnation and method of ma

Details Electrostatic chuck with polymeric impregnation and method of ma Electrostatic chuck with polymeric impregnation and method of ma

1995-01-12

1998-08-11

Speer, Timothy M.

Stock material or miscellaneous articles

Composite

Of metal

4283066, 4283073, 428469, 428472, 361230, 361234, 279128, 269 13, 156345, 118723R, B32B 1508

Patent

active

057925623

ABSTRACT:
An electrostatic chuck includes a pedestal having a metallic upper surface, and a layer of a porous dielectric material formed on said upper surface of the pedestal. The dielectric layer is impregnated with a plasma-resistant sealant.

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