Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent
1996-08-16
1998-09-01
Speer, Timothy M.
Coating processes
With post-treatment of coating or coating material
Heating or drying
427409, B05D 302
Patent
active
058008713
ABSTRACT:
An electrostatic chuck includes a pedestal having a metallic upper surface, and a layer of a porous dielectric material formed on said upper surface of the pedestal. The dielectric layer is impregnated with a plasma-resistant sealant.
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Buchberger Douglas
Collins Kenneth S.
Tsui Joshua Chiu-Wing
Applied Materials Inc.
Janah Ashok K.
Sgarbossa Peter J.
Speer Timothy M.
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