4. Adhesive bonding and miscellaneous chemical manufacture
  5. Methods
  6. Surface bonding and/or assembly therefor

Rolf A. Guenther

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Apparatus for providing gas to a processing chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Electrostatic chuck having a thermal transfer regulator pad

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Integrated method for release and passivation of MEMS...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Integrated method for release and passivation of MEMS...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method and apparatus for generating gas to a processing chamber

Drying and gas or vapor contact with solids – Apparatus – With fluid current conveying of treated material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1570716

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