Electroplating an yttrium-containing coating on a chamber...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Forming multiple superposed electrolytic coatings

Reexamination Certificate

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C205S192000, C205S224000, C205S227000, C205S228000, C205S261000

Reexamination Certificate

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07833401

ABSTRACT:
A method of forming a component capable of being exposed to a plasma in a process chamber comprises forming a structure comprising a surface and electroplating yttrium, and optionally aluminum or zirconium, onto the surface. Thereafter, the electroplated layer can be annealed to oxide the yttrium and other electroplated species.

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