Electroplating an yttrium-containing coating on a chamber...

Details Electroplating an yttrium-containing coating on a chamber... Electroplating an yttrium-containing coating on a chamber...

2007-06-21

2010-11-16

Ryan, Patrick (Department: 1795)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Forming multiple superposed electrolytic coatings

C205S192000, C205S224000, C205S227000, C205S228000, C205S261000

Reexamination Certificate

active

07833401

ABSTRACT:
A method of forming a component capable of being exposed to a plasma in a process chamber comprises forming a structure comprising a surface and electroplating yttrium, and optionally aluminum or zirconium, onto the surface. Thereafter, the electroplated layer can be annealed to oxide the yttrium and other electroplated species.

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