4. Electric lamp or space discharge component or device manufacturi
  5. Process
  6. With assembly or disassembly

Jennifer Y. Sun

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Clean, dense yttrium oxide coating protecting semiconductor...

Coating processes – Spray coating utilizing flame or plasma heat – Metal oxide containing coating
Reexamination Certificate

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Cleaning method used in removing contaminants from a solid...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Diamond coated parts in a plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Electroplating an yttrium-containing coating on a chamber...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Forming multiple superposed electrolytic coatings
Reexamination Certificate

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Gas distribution showerhead for semiconductor processing

Fluid sprinkling – spraying – and diffusing – With selectively preset flow cutoff or initiating means
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Profile ID: LFUS-PAI-P-1921066

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