Inductor devices – Inductive regulators with no relatively moving parts
Patent
1992-11-12
1995-02-21
Picard, Leo P.
Inductor devices
Inductive regulators with no relatively moving parts
336 57, 336 84C, 336196, H01F 2100
Patent
active
053920180
ABSTRACT:
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
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Buchberger, II Douglas A.
Collins Kenneth S.
Hartlage Robert P.
Pinson, II Jay D.
Roderick Craig A.
Applied Materials Inc.
Picard Leo P.
Prahl Eric L.
Thomas L.
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