Wave transmission lines and networks – Automatically controlled systems – Impedance matching
Patent
1994-11-09
1996-11-12
Gensler, Paul
Wave transmission lines and networks
Automatically controlled systems
Impedance matching
333 32, 334 12, H03H 740
Patent
active
055744109
ABSTRACT:
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
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Buchberger, II Douglas A.
Collins Kenneth S.
Hartlage Robert P.
Pinson, II Jay D.
Roderick Craig A.
Applied Materials Inc.
Gensler Paul
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