Electron microscope

Details Electron microscope Electron microscope

1998-07-30

2000-04-18

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

H01J 3726

Patent

active

060518340

ABSTRACT:
3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.

REFERENCES:
patent: 4847497 (1989-07-01), Mori
patent: 5003173 (1991-03-01), De Jong

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