4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Mikio Ichihashi

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Apparatus for focusing a charged particle beam onto a specimen

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Apparatus for introducing oxygen gas

Electric lamp and discharge devices – Having heating means to control gas/vapor – gas or vapor... – Gas generating
Patent

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Charged particle beam apparatus having particular electrostatic

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Profile ID: LFUS-PAI-P-736040

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