4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Hiroshi Kakibayashi

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Bio electron microscope and observation method of specimen

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Defect observing electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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