Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1996-07-26
1999-02-02
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
H01J 3726
Patent
active
058669051
ABSTRACT:
A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.
REFERENCES:
patent: 3847689 (1974-11-01), Fletcher et al.
patent: 4038543 (1977-07-01), Kristh et al.
patent: 4068123 (1978-01-01), Kokubo
patent: 4099055 (1978-07-01), Todokoro
patent: 4608491 (1986-08-01), Kakubo
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4724320 (1988-02-01), Ino et al.
patent: 4866273 (1989-09-01), Kobayashi et al.
patent: 4942299 (1990-07-01), Kazinerski
patent: 4945237 (1990-07-01), Shii et al.
patent: 4975578 (1990-12-01), Tomimasu et al.
patent: 5095207 (1992-03-01), Tong
patent: 5144148 (1992-09-01), Eigler
patent: 5278408 (1994-01-01), Kakibayashi
patent: 5650621 (1997-07-01), Tsuneta et al.
Mayer et al, "Structures of Nb/Al.sub.2 O.sub.3 Interfaces Produced by Different Experimental Routes", Materials Research Society, vol. 183, pp. 55-58, no dated.
U. Gross et al, "The Microprocessor-Controlled CM12/STEM Scanning-Transmission Electron Microscope", Philips Technical Review, Nov. 1987, vol. 43, No. 10, Eindhoven, The Netherlands.
M. Haider, "Filtered Dark-Field and Pure Z-Contrast: Two Novel Imaging Modes in a Scanning Transmission Electron Microscope", 1989, North-Holland, Amsterdam.
Fiber Optically Coupled TV Screen, Model 622SC.
Ichihashi Mikio
Isakozawa Shigeto
Kakibayashi Hiroshi
Koguchi Masanari
Kuroda Katsuhiro
Hitachi , Ltd.
Nguyen Kiet T.
LandOfFree
Electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1119791