4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Alexander Goldenstein

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Electron detector with high backscattered electron acceptance fo

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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System for high resolution imaging and measurement of topographi

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Profile ID: LFUS-PAI-P-827311

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