4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Methods

Opal Technologies Ltd.

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Electron detector with high backscattered electron acceptance fo

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Method and apparatus for detecting surface deviations from a ref

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Reliable defect detection using multiple perspective scanning el

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent

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