Edge bead removal by an electro polishing process

Details Edge bead removal by an electro polishing process Edge bead removal by an electro polishing process

2007-12-04

2007-12-04

Morgan, Eileen P. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S057000, C451S287000, C156S345280, C204S22400M, C205S642000, C205S662000, C205S663000

Reexamination Certificate

active

11087878

ABSTRACT:
A method and apparatus for the removal of a deposited conductive layer along an edge of a substrate using an electrode configured to electro polish a substrate edge are disclosed. The electro polishing of the substrate edge may occur simultaneously during electrochemical mechanical processing (Ecmp) of a substrate face. In one embodiment, a power source applies a bias between the substrate and at least two electrodes. The electrodes form a first electrode zone proximate the substrate edge at a sufficient potential to electro polish the substrate edge, thereby removing the conductive layer from the substrate edge. A second electrode zone with a lower potential than the first electrode zone is aligned proximate the substrate face during processing to enable Ecmp of the substrate face.

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