Thermal measuring and testing – Thermal testing of a nonthermal quantity – Of cure or hardenability
Reexamination Certificate
2006-09-01
2009-02-24
Lefkowitz, Edward (Department: 2855)
Thermal measuring and testing
Thermal testing of a nonthermal quantity
Of cure or hardenability
C374S130000, C374S167000, C374SE17002, C374S052000, C438S663000, C219S121830, C219S121760, C356S047000, C372S050122
Reexamination Certificate
active
07494272
ABSTRACT:
Apparatus for dynamic surface annealing of a semiconductor wafer includes a source of laser radiation emitting at a laser wavelength and comprising an array of lasers arranged in rows and columns, the optical power of each the laser being individual adjustable and optics for focusing the radiation from the array of lasers into a narrow line beam in a workpiece plane corresponding to a workpiece surface, whereby the optics images respective columns of the laser array onto respective sections of the narrow line beam. A pyrometer sensor is provided that is sensitive to a pyrometer wavelength. An optical element in an optical path of the optics is tuned to divert radiation emanating from the workpiece plane to the pyrometry sensor. As a result, the optics images each of the respective section of the narrow line beam onto a corresponding portion of the pyrometer sensor. The apparatus further includes a controller responsive to the pyrometry sensor and coupled to adjust individual optical outputs of respective columns of the laser array in accordance with outputs of corresponding portions of the pyrometry sensor.
REFERENCES:
patent: 4328516 (1982-05-01), Colpack et al.
patent: 6419387 (2002-07-01), Legrandjacques et al.
patent: 6728275 (2004-04-01), Stephens, IV et al.
patent: 6987240 (2006-01-01), Jennings et al.
patent: 7015422 (2006-03-01), Timans
patent: 2003/0052105 (2003-03-01), Nagano et al.
patent: 2004/0018008 (2004-01-01), Koren et al.
patent: 2004/0198028 (2004-10-01), Tanaka et al.
patent: 2006/0102607 (2006-05-01), Adams et al.
Adams Bruce E.
Jennings Dean
Mayur Abhilash J.
Thomas Timothy N.
Adams Bret
Applied Materials Inc.
Law Office of Robert M. Wallace
Lefkowitz Edward
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