Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With reflector – opaque mask – or optical element integral...
Reexamination Certificate
2007-10-09
2007-10-09
Nhu, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Incoherent light emitter structure
With reflector, opaque mask, or optical element integral...
C257S288000, C257S428000, C257SE21134, C257SE21347, C257SE21333, C257SE21475
Reexamination Certificate
active
11105270
ABSTRACT:
A thermal processing apparatus and method in which a first laser source, for example, a CO2emitting at 10.6 μm is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the wafer as a larger beam surrounding the line beam. The two beams are scanned in synchronism in the direction of the narrow dimension of the line beam to create a narrow heating pulse from the line beam when activated by the larger beam. The energy of GaAs radiation is greater than the silicon bandgap energy and creates free carriers. The energy of the CO2radiation is less than the silicon bandgap energy so silicon is otherwise transparent to it, but the long wavelength radiation is absorbed by the free carriers.
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Adams Bruce
Hunter Aaron
Jennings Dean
Liang Haifan
Mayur Abhilash
Applied Materials Inc.
Law Office of Charles Guenzer
Nhu David
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