4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Haifan Liang

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Absorber layer for DSA processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Absorber layer for DSA processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Chemical vapor deposition of fluorine-doped zinc oxide

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Dual wavelength thermal flux laser anneal

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With reflector – opaque mask – or optical element integral...
Reexamination Certificate

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Gate electrode dopant activation method for semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-1900742

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