Compositions – Etching or brightening compositions
Reexamination Certificate
2006-03-07
2006-03-07
Norton, Nadine G. (Department: 1765)
Compositions
Etching or brightening compositions
C252S079200, C252S079400, C438S692000
Reexamination Certificate
active
07008554
ABSTRACT:
Compositions and methods for removal of barrier layer materials by a chemical mechanical polishing technique are provided. In one aspect, the invention provides a composition adapted for removing a barrier layer material in a chemical mechanical polishing technique including at least one reducing agent selected from the group of bicarboxylic acids, tricarboxylic acids, and combinations thereof, at least one reducing agent selected from the group of glucose, hydroxylamine, and combinations thereof, and deionized water, wherein the composition has a pH of about 7 or less. The composition may be used in a method for removing the barrier layer material including applying the composition to a polishing pad and polishing the substrate in the presence of the composition to remove the barrier layer.
REFERENCES:
patent: 4920031 (1990-04-01), Ohno et al.
patent: 5340370 (1994-08-01), Cadien et al.
patent: 5676587 (1997-10-01), Landers et al.
patent: 5693563 (1997-12-01), Teong
patent: 5735963 (1998-04-01), Obeng
patent: 5783489 (1998-07-01), Kaufman et al.
patent: 5842910 (1998-12-01), Krywanczyk et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5897426 (1999-04-01), Somekh
patent: 5954997 (1999-09-01), Kaufman et al.
patent: 5981454 (1999-11-01), Small
patent: 5985748 (1999-11-01), Watts et al.
patent: 6001730 (1999-12-01), Farkas et al.
patent: 6068879 (2000-05-01), Pasch
patent: 6074949 (2000-06-01), Schonauer et al.
patent: 6083840 (2000-07-01), Mravic et al.
patent: 6113465 (2000-09-01), Kim et al.
patent: 6117775 (2000-09-01), Kondo et al.
patent: 6117783 (2000-09-01), Small et al.
patent: 6136714 (2000-10-01), Schutz
patent: 6143656 (2000-11-01), Yang et al.
patent: 6156661 (2000-12-01), Small
patent: 6165052 (2000-12-01), Yu et al.
patent: 6183686 (2001-02-01), Bardus et al.
patent: 6184141 (2001-02-01), Avanzino et al.
patent: 6204169 (2001-03-01), Bajaj et al.
patent: 6217416 (2001-04-01), Kaufman et al.
patent: 6218290 (2001-04-01), Schonauer et al.
patent: 6235633 (2001-05-01), Jang
patent: 6238592 (2001-05-01), Hardy et al.
patent: 6258721 (2001-07-01), Li et al.
patent: 6271416 (2001-08-01), Takagaki et al.
patent: 6313039 (2001-11-01), Small et al.
patent: 6355075 (2002-03-01), Ina et al.
patent: 6375559 (2002-04-01), James et al.
patent: 6409781 (2002-06-01), Wojtczak et al.
patent: 6432823 (2002-08-01), Huynh et al.
patent: 6435945 (2002-08-01), Somekh
patent: 6444569 (2002-09-01), Farkas et al.
patent: 6709316 (2004-03-01), Sun et al.
patent: 2001/0013506 (2001-08-01), Chamberlin et al.
patent: 2002/0068454 (2002-06-01), Sun et al.
patent: 2002/0090820 (2002-07-01), Sun et al.
patent: 2003/0013306 (2003-01-01), Tsai et al.
patent: 2003/0013387 (2003-01-01), Tsai
patent: 2003/0022501 (2003-01-01), Tsai
patent: 2003/0022801 (2003-01-01), Sun et al.
patent: 2003/0029841 (2003-02-01), Moon
patent: 2003/0036339 (2003-02-01), Bonner
patent: 2003/0116445 (2003-06-01), Sun et al.
patent: 2003/0120927 (2003-06-01), Kim
patent: 1 006 166 (2000-06-01), None
patent: 1 006 166 (2000-06-01), None
patent: 1 011 131 (2000-06-01), None
patent: 1 085 067 (2001-03-01), None
patent: 1 093 161 (2001-04-01), None
patent: 1 093 161 (2001-04-01), None
patent: 1 104 020 (2001-05-01), None
patent: 1 104 020 (2001-05-01), None
patent: 1 116 762 (2001-07-01), None
patent: 1 116 762 (2001-07-01), None
patent: 1 125 999 (2001-08-01), None
patent: 1 125 999 (2001-08-01), None
patent: 1 603 558 (1971-06-01), None
patent: 2001-127018 (2001-05-01), None
patent: 2001-139937 (2001-05-01), None
patent: 2000011709 (2000-02-01), None
patent: 2000-011709 (2000-02-01), None
patent: WO 98/04646 (1998-02-01), None
patent: WO 98/36045 (1998-08-01), None
patent: WO 98/44061 (1998-08-01), None
patent: WO 98/41671 (1998-09-01), None
patent: WO 98/49723 (1998-11-01), None
patent: WO 99/46081 (1999-09-01), None
patent: WO 00/00561 (2000-01-01), None
patent: WO 00/02235 (2000-01-01), None
patent: WO 00/02238 (2000-01-01), None
patent: WO 00/35627 (2000-02-01), None
patent: WO 00/24842 (2000-05-01), None
patent: WO 00/30159 (2000-05-01), None
patent: 00/35627 (2000-06-01), None
US 5,985,755, 11/1999, Bajaj et al. (withdrawn)
Partial Search Report (Form PCT/ISA/206—Annex) for PCT/US02/22126, dated Dec. 6, 2002.
PCT International Search Report from International Application No. PCT/US01/50150, Dated Sep. 23, 2002.
International Search Report for PCT/US02/00062, dated Jul. 8, 2002.
U.S. Appl. No. 09/569,968, filed May 11, 2000, Sun et al.
U.S. Appl. No. 09/968,863, filed Oct. 27, 2000, Tsai et al.
U.S. Appl. No. 09/968,864, filed Oct. 27, 2000, Sun et al.
U.S. Appl. No. 09/755,717, filed Jan. 5, 2001, Sun et al.
U.S. Appl. No. 10/187,857, filed Jun. 27, 2002, Tsai et al.
U.S. Appl. No. 10/215,521, filed Aug. 8, 2002, Sun et al.
PCT International Search Report from International Application No. PCT/US 02/ 22126, dated Mar. 5, 2003.
Written Opinion from PCT International Preliminary Examining Authority for US/02/00062, dated May 12, 2003.
International Search Report for PCT /US02/0062, dated Jul. 8, 2002. (AMAT/5538PCT).
PCT International Search Report from International Application No. PCT/US01/50150, dated Sep. 23, 2002. (AMAT/5084PCT).
Partial Search Report (Form PCT/ISA/206-Annex) for PCT/US02/22126, dated Dec. 6, 2002. (AMAT/5845PCT).
PCT International Search Report from International Application No. PCT/US02/22126, dated Mar. 5, 2003. (AMAT/5845PCT).
Written Opinion from PCT International Preliminary Examining Authority for US/02/00062, dated May 12, 2003. (AMAT/5538PCT).
PCT Written Opinion dated Feb. 28, 2005 for PCT/US01/501150. (AMAT/5084PC).
PCT Written Opinion dated Feb. 24, 2005, for PCT/US02/22126. (AMAT/5845PC).
PCT International Search Report dated Mar. 5, 2003 for PCT/US02/22126. (AMAT/5845PCT).
Chen Liang-Yuh
Li Shijian
Liu Feng Q.
Sun Lizhong
Tsai Stan D.
Applied Materials Inc.
Moser Patterson & Sheridan
Norton Nadine G.
Tran Binh X.
LandOfFree
Dual reduced agents for barrier removal in chemical... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dual reduced agents for barrier removal in chemical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dual reduced agents for barrier removal in chemical... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3538573