4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Binh X. Tran

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Additives to CMP slurry to polish dielectric films

Compositions – Etching or brightening compositions
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Adjustable dual frequency voltage dividing plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
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Advance integrated chemical vapor deposition (AICVD) for...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step of heat treating...
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Alumina abrasive for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Alumina abrasive for chemical mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-360272

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