Device for measuring height of object

Details Device for measuring height of object Device for measuring height of object

1997-07-30

1998-10-20

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356375, 356376, 356387, 356237, 25055906, 25055919, 25055922, 359298, 359299, 359305, 359312, G01B 1114, G01N 2100, G02F 133

Patent

active

058254978

ABSTRACT:
An object surface height measuring device with two acousto-optical modules for refracting light from a light emitter with predetermined refractive indices depending on frequency modulation so that the light is swept over the X and Y axes of an object, and two other acousto-optical modules synchronized with the signals of the first two acousto-optical modules, respectively, so that the light reflected from the object is focused onto a light receiving portion. The change in the height of the object is measured from the variation between the spot of light focused onto the light receiving portion and the center of the light receiver.

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