Depositing an oxide

Details Depositing an oxide Depositing an oxide

2007-03-20

2007-03-20

Estrada, Michelle (Department: 2823)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S782000, C257SE23095

Reexamination Certificate

active

10696204

ABSTRACT:
A dielectric deposited on a substrate may be exposed to a salt solution. While exposed to the salt solution, an oxide is deposited on the dielectric.

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ews/conferences/Reliability4/Documents/03—Gate—Stack—Transitor—Lucovsky.pdf.

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