Abrading – Rigid tool – Rotary disk
Reexamination Certificate
2007-12-25
2007-12-25
Thomas, David B (Department: 3723)
Abrading
Rigid tool
Rotary disk
C451S533000
Reexamination Certificate
active
11556011
ABSTRACT:
An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate. A plurality of perforations may be formed in the polishing article for flow of material therethrough. An electrode is also exposed to the polishing surface by at least a portion of the plurality of perforations. The article of manufacture may also include a polishing surface having a plurality of grooves, wherein a portion of the plurality of grooves intersect with a portion of the plurality of perforations.
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Birang Manoocher
Butterfield Paul D.
Carl Daniel A.
Chen Liang-Yuh
Duboust Alain
Applied Materials Inc.
Patterson & Sheridan
Thomas David B
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