Abrading – Flexible-member tool – per se
Reexamination Certificate
2007-10-09
2007-10-09
Thomas, David B (Department: 3723)
Abrading
Flexible-member tool, per se
C451S533000
Reexamination Certificate
active
11215254
ABSTRACT:
Embodiments of a polishing article for polishing a substrate are provided. In one embodiment, the polishing article includes a ring-shaped upper layer having a polishing surface, and a conductive layer coupled to the upper layer and forming a replaceable assembly therewith.
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Butterfield Paul D.
Chen Liang-Yuh
Duboust Alain
Hu Yonqi
Liu Feng Q.
Applied Materials Inc.
Patterson & Sheridan
Thomas David B
LandOfFree
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