Abrading – Flexible-member tool – per se
Reexamination Certificate
2007-04-24
2007-04-24
Thomas, David B. (Department: 3723)
Abrading
Flexible-member tool, per se
C204S22400M
Reexamination Certificate
active
11031545
ABSTRACT:
Embodiments of a polishing article for processing a substrate are provided. In one embodiment, a polishing article for processing a substrate comprises a fabric layer having a conductive layer disposed thereover. The conductive layer has an exposed surface adapted to polish a substrate. The fabric layer may be woven or non-woven. The conductive layer may be comprised of a soft metal and, in one embodiment, the exposed surface may be planar.
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patent:
Butterfield Paul D.
Chen Liang-Yuh
Duboust Alain
Hu Yongqi
Ko Sen-Hou
Applied Materials Inc.
Patterson and Sheridan
Thomas David B.
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