Conductive polishing article for electrochemical mechanical...

Details Conductive polishing article for electrochemical mechanical... Conductive polishing article for electrochemical mechanical...

2006-06-27

2006-06-27

Thomas, David B. (Department: 3723)

Abrading

Flexible-member tool, per se

C451S529000, C451S288000

Reexamination Certificate

active

07066800

ABSTRACT:
An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface. A plurality of perforations may be formed in the polishing article for flow of material therethrough. In another aspect, a polishing article for polishing a substrate includes a body having a polishing surface and a conductive element disposed therein. The conductive element may have a contact surface that extends beyond a plane defined by the polishing surface. The polishing surface may have one or more pockets formed therein. The conductive element may be disposed in each of the polishing pockets.

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