Abrading – Rigid tool – Rotary disk
Reexamination Certificate
2006-11-21
2006-11-21
Thomas, David B. (Department: 3723)
Abrading
Rigid tool
Rotary disk
C451S533000
Reexamination Certificate
active
07137879
ABSTRACT:
An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface. A plurality of perforations may be formed in the polishing article for flow of material therethrough. In another aspect, a polishing article for polishing a substrate includes a body having a polishing surface and a conductive element disposed therein. The conductive element may have a contact surface that extends beyond a plane defined by the polishing surface. The polishing surface may have one or more pockets formed therein. The conductive element may be disposed in each of the polishing pockets.
REFERENCES:
patent: 1601642 (1926-09-01), Parker
patent: 1927162 (1933-09-01), Fiedler et al.
patent: 2112691 (1938-03-01), Crowder
patent: 2240285 (1941-04-01), Nachtman
patent: 2392687 (1946-01-01), Nachtman
patent: 2431065 (1947-11-01), Miller
patent: 2451341 (1948-10-01), Jemstedt
patent: 2453481 (1948-11-01), Wilson
patent: 2454935 (1948-11-01), Miller
patent: 2456185 (1948-12-01), Grube
patent: 2457510 (1948-12-01), van Omum
patent: 2458676 (1949-01-01), Brenner et al.
patent: 2461556 (1949-02-01), Lorig
patent: 2473290 (1949-06-01), Millard
patent: 2477808 (1949-08-01), Jones
patent: 2479323 (1949-08-01), Davis
patent: 2480022 (1949-08-01), Hogaboom
patent: 2490055 (1949-12-01), Hoff
patent: 2495695 (1950-01-01), Camin et al.
patent: 2500205 (1950-03-01), Schaefer
patent: 2500206 (1950-03-01), Schaefer et al.
patent: 2503863 (1950-04-01), Bart
patent: 2506794 (1950-05-01), Kennedy et al.
patent: 2509304 (1950-05-01), Klein
patent: 2512328 (1950-06-01), Hays
patent: 2517907 (1950-08-01), Mikulas
patent: 2519945 (1950-08-01), Twele et al.
patent: 2530677 (1950-11-01), Berkenkotter et al.
patent: 2535966 (1950-12-01), Teplitz
patent: 2536912 (1951-01-01), Cobertt
patent: 2539898 (1951-01-01), Davis
patent: 2540175 (1951-02-01), Rosenqvist
patent: 2544510 (1951-03-01), Prahl
patent: 2549678 (1951-04-01), Fiandt
patent: 2554943 (1951-05-01), Farmer
patent: 2556017 (1951-06-01), Vonada
patent: 2560534 (1951-07-01), Adler
patent: 2560966 (1951-07-01), Lee
patent: 2569577 (1951-10-01), Reading
patent: 2569578 (1951-10-01), Rieger
patent: 2571709 (1951-10-01), Gray
patent: 2576074 (1951-11-01), Nachtman
patent: 2587630 (1952-03-01), Konrad et al.
patent: 2619454 (1952-11-01), Zapponi
patent: 2633452 (1953-03-01), Hogaboom, Jr., et al.
patent: 2646398 (1953-07-01), Henderson
patent: 2656283 (1953-10-01), Fink et al.
patent: 2656284 (1953-10-01), Toulmin
patent: 2657177 (1953-10-01), Rendel
patent: 2657457 (1953-11-01), Toulmin
patent: 2673836 (1954-03-01), Vonada
patent: 2674550 (1954-04-01), Dunlevy et al.
patent: 2675348 (1954-04-01), Greenspan
patent: 2680710 (1954-06-01), Kenmore et al.
patent: 2684939 (1954-07-01), Geese
patent: 2696859 (1954-08-01), Gray et al.
patent: 2689215 (1954-09-01), Bart
patent: 2695269 (1954-11-01), de Witz et al.
patent: 2698832 (1955-01-01), Swanson
patent: 2706173 (1955-04-01), Wells et al.
patent: 2706175 (1955-04-01), Licharz
patent: 2708445 (1955-05-01), Manson et al.
patent: 2710834 (1955-06-01), Vrilakas
patent: 2711993 (1955-06-01), Lyon
patent: 3162588 (1964-12-01), Bell
patent: 3334041 (1967-08-01), Dyer et al.
patent: 3433730 (1969-03-01), Kennedy et al.
patent: 3448023 (1969-06-01), Bell
patent: 3476677 (1969-11-01), Corley et al.
patent: 3607707 (1971-09-01), Chenevier
patent: 3873512 (1975-03-01), Latanision
patent: 3942959 (1976-03-01), Markoo et al.
patent: 3992178 (1976-11-01), Markoo et al.
patent: 4047902 (1977-09-01), Wiand
patent: 4082638 (1978-04-01), Jumer
patent: 4119515 (1978-10-01), Costakis
patent: 4125444 (1978-11-01), Inoue
patent: 4199902 (1980-04-01), Sutherland
patent: 4312716 (1982-01-01), Maschler et al.
patent: 4523411 (1985-06-01), Freerks
patent: 4704511 (1987-11-01), Miyano
patent: 4713149 (1987-12-01), Hoshino
patent: 4752371 (1988-06-01), Kreisel et al.
patent: 4772361 (1988-09-01), Dorsett et al.
patent: 4793895 (1988-12-01), Kaanta et al.
patent: 4839993 (1989-06-01), Masuko et al.
patent: 4934102 (1990-06-01), Leach et al.
patent: 4954141 (1990-09-01), Takiyama et al.
patent: 4956056 (1990-09-01), Zubatova et al.
patent: 5011510 (1991-04-01), Hayakawa et al.
patent: 5061294 (1991-10-01), Harmer et al.
patent: 5066370 (1991-11-01), Andreshak et al.
patent: 5096550 (1992-03-01), Mayer et al.
patent: 5108463 (1992-04-01), Buchanan
patent: 5136817 (1992-08-01), Tabata et al.
patent: 5137542 (1992-08-01), Buchanan et al.
patent: 5203884 (1993-04-01), Buchanan et al.
patent: 5217586 (1993-06-01), Datta et al.
patent: 5225034 (1993-07-01), Yu et al.
patent: 5257478 (1993-11-01), Hyde et al.
patent: 5328716 (1994-07-01), Buchanan
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5534106 (1996-07-01), Cote et al.
patent: 5543032 (1996-08-01), Datta et al.
patent: 5560753 (1996-10-01), Schnabel et al.
patent: 5562529 (1996-10-01), Kishii et al.
patent: 5567300 (1996-10-01), Datta et al.
patent: 5575706 (1996-11-01), Tsai et al.
patent: 5578362 (1996-11-01), Reinhardt et al.
patent: 5624300 (1997-04-01), Kishii et al.
patent: 5633068 (1997-05-01), Ryoke et al.
patent: 5654078 (1997-08-01), Ferronato
patent: 5674122 (1997-10-01), Krece
patent: 5702811 (1997-12-01), Ho et al.
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5804507 (1998-09-01), Perlov et al.
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5823854 (1998-10-01), Chen
patent: 5840190 (1998-11-01), Scholander et al.
patent: 5840629 (1998-11-01), Carpio
patent: 5846882 (1998-12-01), Birang
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5882491 (1999-03-01), Wardle
patent: 5893796 (1999-04-01), Birang et al.
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5948697 (1999-09-01), Hata
patent: 5985093 (1999-11-01), Chen
patent: 6001008 (1999-12-01), Fujimori et al.
patent: 6004880 (1999-12-01), Liu et al.
patent: 6017265 (2000-01-01), Cook et al.
patent: 6020264 (2000-02-01), Lustig et al.
patent: 6024630 (2000-02-01), Shendon et al.
patent: 6033293 (2000-03-01), Crevasse et al.
patent: 6056851 (2000-05-01), Hsieh et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6074284 (2000-06-01), Tani et al.
patent: 6077337 (2000-06-01), Lee
patent: 6090239 (2000-07-01), Liu et al.
patent: 6103096 (2000-08-01), Datta et al.
patent: 6116998 (2000-09-01), Damgaard et al.
patent: 6132292 (2000-10-01), Kubo
patent: 6153043 (2000-11-01), Edelstein et al.
patent: 6156124 (2000-12-01), Tobin
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6171467 (2001-01-01), Weihs et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6176998 (2001-01-01), Wardle et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6190494 (2001-02-01), Dow
patent: 6210257 (2001-04-01), Carlson
patent: 6234870 (2001-05-01), Uzoh et al.
patent: 6238271 (2001-05-01), Cesna
patent: 6238592 (2001-05-01), Hardy et al.
patent: 6244935 (2001-06-01), Birang et al.
patent: 6248222 (2001-06-01), Wang
patent: 6251235 (2001-06-01), Talieh et al.
patent: 6257953 (2001-07-01), Gitis et al.
patent: 6258223 (2001-07-01), Cheung et al.
patent: 6261168 (2001-07-01), Jensen et al.
patent: 6261959 (2001-07-01), Travis et al.
patent: 6273798 (2001-08-01), Berman
patent: 6296557 (2001-10-01), Walker
patent: 6297159 (2001-10-01), Paton
patent: 6319108 (2001-11-01), Adefris et al.
patent: 6319420 (2001-11-01), Dow
patent: 6322422 (2001-11-01), Satou
patent: 6328642 (2001-12-01), Pant et al.
patent: 6328872 (2001-12-01), Talieh et al.
patent: 6331135 (2001-12-01), Sabde et al.
patent: 6368184 (2002-04-01), Beckage
patent: 6368190 (2002-04-01), Easter et al.
patent: 6372001 (2002-04-01), Omar et al.
patent: 6379223 (2002-04-01), Sun et al.
patent: 6381169 (2002-04-01), Bocian et al.
patent: 6383066 (2002-05-01), Chen et al.
patent: 6386956 (2002-05-01), Sato et al.
patent: 6391166 (2002-05-01), Wang
patent: 6395152 (2002-05-01), Wang
patent: 6402591 (2002-06-01), Thorn
Birang Manoocher
Butterfield Paul D.
Carl Daniel A.
Chen Liang-Yuh
Duboust Alain
Applied Materials Inc.
Patterson and Sheridan
Thomas David B.
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