Abrading – Flexible-member tool – per se
Reexamination Certificate
2006-01-31
2006-01-31
Thomas, David B. (Department: 3723)
Abrading
Flexible-member tool, per se
C205S663000, C204S22400M
Reexamination Certificate
active
06991528
ABSTRACT:
Embodiments of a polishing article for processing a substrate are provided. In one embodiment, a polishing article for processing a substrate comprises a fabric layer having a conductive layer disposed thereover. The conductive layer has an exposed surface adapted to polish a substrate. The fabric layer may be woven or non-woven. The conductive layer may be comprised of a soft metal and, in one embodiment, the exposed surface may be planar.
REFERENCES:
patent: 1601642 (1926-09-01), Parker
patent: 1927162 (1933-09-01), Fledler et al.
patent: 2112691 (1938-03-01), Crowder
patent: 2240265 (1941-04-01), Nachtman
patent: 2392687 (1946-01-01), Nachtman
patent: 2431065 (1947-11-01), Miller
patent: 2451341 (1948-10-01), Jemstedt
patent: 2453481 (1948-11-01), Wilson
patent: 2454935 (1948-11-01), Miller
patent: 2456185 (1948-12-01), Grube
patent: 2457510 (1948-12-01), van Omum
patent: 2458676 (1949-01-01), Brenner et al.
patent: 2473290 (1949-01-01), Millard
patent: 2461556 (1949-02-01), Lorig
patent: 2477808 (1949-08-01), Jones
patent: 2479323 (1949-08-01), Davis
patent: 2480022 (1949-08-01), Hogaboom
patent: 2490055 (1949-12-01), Hoff
patent: 2495695 (1950-01-01), Camin et al.
patent: 2500205 (1950-03-01), Schaefer
patent: 2500206 (1950-03-01), Schaefer et al.
patent: 2503863 (1950-04-01), Bart
patent: 2506794 (1950-05-01), Kennedy et al.
patent: 2509304 (1950-05-01), Klein
patent: 2512328 (1950-06-01), Hays
patent: 2517907 (1950-08-01), Mikulas
patent: 2519945 (1950-08-01), Twele et al.
patent: 2530677 (1950-11-01), Berkenkotter et al.
patent: 2535966 (1950-12-01), Teplitz
patent: 2536912 (1951-01-01), Cobertt
patent: 2539898 (1951-01-01), Davis
patent: 2540175 (1951-02-01), Rosenqvist
patent: 2544510 (1951-03-01), Prahl
patent: 2549678 (1951-04-01), Flandt
patent: 2544943 (1951-05-01), Farmer
patent: 2556017 (1951-06-01), Vonada
patent: 2560534 (1951-07-01), Adler
patent: 2560966 (1951-07-01), Lee
patent: 2569577 (1951-10-01), Reading
patent: 2569578 (1951-10-01), Rieger
patent: 2571709 (1951-10-01), Gray
patent: 2576074 (1951-11-01), Nachtman
patent: 2587630 (1952-03-01), Konrad et al.
patent: 2619454 (1952-11-01), Zapponi
patent: 2633452 (1953-03-01), Hogaboom, Jr. et al.
patent: 2646398 (1953-07-01), Henderson
patent: 2656283 (1953-10-01), Fink et al.
patent: 2656284 (1953-10-01), Toulmin
patent: 2657177 (1953-10-01), Rendel
patent: 2657457 (1953-11-01), Toulmin
patent: 2673836 (1954-03-01), Vonada
patent: 2674550 (1954-04-01), Dunlevy et al.
patent: 2675348 (1954-04-01), Greenspan
patent: 2680710 (1954-06-01), Kenmore et al.
patent: 2684939 (1954-07-01), Geese
patent: 2696859 (1954-08-01), Gray et al.
patent: 2689215 (1954-09-01), Bart
patent: 2695269 (1954-11-01), de Witz et al.
patent: 2698832 (1955-01-01), Swanson
patent: 2706173 (1955-04-01), Wells et al.
patent: 2706175 (1955-04-01), Licharz
patent: 2708445 (1955-05-01), Manson et al.
patent: 2710834 (1955-06-01), Vrilakas
patent: 2711993 (1955-06-01), Lyon
patent: 3334041 (1967-08-01), Dyer et al.
patent: 3433730 (1969-03-01), Kennedy et al.
patent: 3448023 (1969-06-01), Bell
patent: 3476677 (1969-11-01), Corley et al.
patent: 3607707 (1971-09-01), Chenevier
patent: 3942959 (1976-03-01), Markoo et al.
patent: 3992178 (1976-11-01), Markoo et al.
patent: 4047902 (1977-09-01), Wiand
patent: 4082638 (1978-04-01), Jumer
patent: 4119515 (1978-10-01), Costakis
patent: 4312716 (1982-01-01), Maschler et al.
patent: 4523411 (1985-06-01), Freerks
patent: 4704511 (1987-11-01), Miyano
patent: 4713149 (1987-12-01), Hoshino
patent: 4752371 (1988-06-01), Kreisel et al.
patent: 4772361 (1988-09-01), Dorsett et al.
patent: 4934102 (1990-06-01), Leach et al.
patent: 5011510 (1991-04-01), Hayakawa et al.
patent: 5061294 (1991-10-01), Harmer et al.
patent: 5066370 (1991-11-01), Andreshak et al.
patent: 5096550 (1992-03-01), Mayer et al.
patent: 5108463 (1992-04-01), Buchanan
patent: 5137542 (1992-08-01), Buchanan et al.
patent: 5203884 (1993-04-01), Buchanan et al.
patent: 5217586 (1993-06-01), Datta et al.
patent: 5225034 (1993-07-01), Yu et al.
patent: 5257478 (1993-11-01), Hyde et al.
patent: 5328716 (1994-07-01), Buchanan
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5534106 (1996-07-01), Cote et al.
patent: 5560753 (1996-10-01), Schnabel et al.
patent: 5562529 (1996-10-01), Kishii et al.
patent: 5633068 (1997-05-01), Ryoke et al.
patent: 5654078 (1997-08-01), Ferronato
patent: 5674122 (1997-10-01), Krech
patent: 5702811 (1997-12-01), Ho et al.
patent: 5823854 (1998-10-01), Chen
patent: 5840190 (1998-11-01), Scholander et al.
patent: 5840629 (1998-11-01), Carpio
patent: 5882491 (1999-03-01), Wardle
patent: 5893796 (1999-04-01), Birang et al.
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 5948697 (1999-09-01), Hata
patent: 5985093 (1999-11-01), Chen
patent: 6033293 (2000-03-01), Crevasse et al.
patent: 6074284 (2000-06-01), Tani et al.
patent: 6077337 (2000-06-01), Lee
patent: 6176998 (2001-01-01), Wardle et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6190494 (2001-02-01), Dow
patent: 6238592 (2001-05-01), Hardy et al.
patent: 6251235 (2001-06-01), Talieh et al.
patent: 6261168 (2001-07-01), Jensen et al.
patent: 6261959 (2001-07-01), Travis et al.
patent: 6319108 (2001-11-01), Adefris et al.
patent: 6319420 (2001-11-01), Dow
patent: 6328642 (2001-12-01), Pant et al.
patent: 6328872 (2001-12-01), Talieh et al.
patent: 6331135 (2001-12-01), Sabde et al.
patent: 6368184 (2002-04-01), Beckage
patent: 6368190 (2002-04-01), Easter et al.
patent: 6372001 (2002-04-01), Omar et al.
patent: 6383066 (2002-05-01), Chen et al.
patent: 6402591 (2002-06-01), Thornton
patent: 6402925 (2002-06-01), Talieh
patent: 6406363 (2002-06-01), Xu et al.
patent: 6409904 (2002-06-01), Uzoh et al.
patent: 6428394 (2002-08-01), Mooring et al.
patent: 6431968 (2002-08-01), Chen et al.
patent: 6447668 (2002-09-01), Wang
patent: 6471847 (2002-10-01), Talieh et al.
patent: 6475332 (2002-11-01), Boyd et al.
patent: 6479962 (2002-11-01), Ziemkowski et al.
patent: 6482307 (2002-11-01), Ashjaee et al.
patent: 6497800 (2002-12-01), Talieh et al.
patent: 6517426 (2003-02-01), Lee
patent: 6520843 (2003-02-01), Halley
patent: 6537140 (2003-03-01), Miller et al.
patent: 6537144 (2003-03-01), Tsai et al.
patent: 6551179 (2003-04-01), Halley
patent: 6561889 (2003-05-01), Xu et al.
patent: 6569004 (2003-05-01), Pham
patent: 6572463 (2003-06-01), Xu et al.
patent: 6585579 (2003-07-01), Jensen et al.
patent: 6630059 (2003-10-01), Uzoh et al.
patent: 6656019 (2003-12-01), Chen et al.
patent: 6666959 (2003-12-01), Uzoh et al.
patent: 6685548 (2004-02-01), Chen et al.
patent: 6739951 (2004-05-01), Sun et al.
patent: 6752700 (2004-06-01), Duescher
patent: 6769969 (2004-08-01), Duescher
patent: 6848977 (2005-02-01), Cook et al.
patent: 2001/0005667 (2001-06-01), Tolles et al.
patent: 2001/0027018 (2001-10-01), Molnar
patent: 2001/0035354 (2001-11-01), Ashjaee et al.
patent: 2002/0011417 (2002-01-01), Talieh et al.
patent: 2002/0020621 (2002-02-01), Uzoh et al.
patent: 2002/0025760 (2002-02-01), Lee et al.
patent: 2002/0025763 (2002-02-01), Lee et al.
patent: 2002/0088715 (2002-07-01), Talieh et al.
patent: 2002/0108861 (2002-08-01), Emesh et al.
patent: 2002/0119286 (2002-08-01), Chen et al.
patent: 2002/0123300 (2002-09-01), Jones et al.
patent: 2002/0130049 (2002-09-01), Chen et al.
patent: 2002/0130634 (2002-09-01), Ziemkowski et al.
patent: 2002/0146963 (2002-10-01), Teetzel
patent: 2002/0148732 (2002-10-01), Emesh et al.
patent: 2003/0013397 (2003-01-01), Rhoades
patent: 2003/0034131 (2003-02-01), Park et al.
patent: 2003/0040188 (2003-02-01), Hsu et al.
patent: 2003/0114087 (2003-06-01), Duboust et al.
patent: 2003/0116445 (2003-06-01), Sun et al.
patent: 2003/0213703 (2003-11-01), Wang et al.
patent: 2003/0220053 (2003-11-01), Manens et al.
patent: 1361023 (2003-11-01), None
patent: 1 368 826 (2003-12-01), None
patent: 58-171264 (1983-10-01), None
patent: 61079666 (1986-04-01), None
patent: 61265279 (1986-11-01), None
patent: 63028512 (1988-02-01), None
patent: 05277957 (1993-10-01), None
patent: 10-006213 (1998-01-01), None
patent: 2870537 (1999-03-01), None
pat
Butterfield Paul D.
Chen Liang-Yuh
Duboust Alain
Hu Yongqi
Ko Sen-Hou
Applied Materials Inc.
Moser Patterson & Sheridan
Thomas David B.
LandOfFree
Conductive polishing article for electrochemical mechanical... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Conductive polishing article for electrochemical mechanical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Conductive polishing article for electrochemical mechanical... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3586956