Abrading – Flexible-member tool – per se – Laminate
Reexamination Certificate
2006-01-24
2006-01-24
Thomas, David B. (Department: 3723)
Abrading
Flexible-member tool, per se
Laminate
C451S527000
Reexamination Certificate
active
06988942
ABSTRACT:
An article of manufacture and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive surface adapted to polish the substrate and a mounting surface. A plurality of perforations may be formed in the polishing article for flow of material therethrough. In another aspect, a polishing article for polishing a substrate includes a body having a polishing surface and a conductive element disposed therein. The conductive element may have a contact surface that extends beyond a plane defined by the polishing surface. The polishing surface may have one or more pockets formed therein. The conductive element may be disposed in each of the polishing pockets.
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Birang Manoocher
Butterfield Paul D.
Carl Daniel A.
Chen Liang-Yuh
Duboust Alain
Applied Materials Inc.
Patterson & Sheridan
Thomas David B.
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