Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate
2006-10-31
2008-03-18
Thomas, David B (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
With indicating
C451S533000
Reexamination Certificate
active
07344432
ABSTRACT:
An article of manufacture and apparatus are provided for processing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including polishing article comprising a body having at least a partially conductive polishing surface. An electrode is disposed below the polishing surface having a dielectric material therebetween. A plurality of apertures may be formed in the polishing surface and the dielectric material to at least partially expose the electrode to the polishing surface. A membrane may be disposed between the electrode and the polishing surface that is permeable to ions and current to promote continuity between the electrode and the polishing surface.
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Birang Manoocher
Butterfield Paul D.
Carl Daniel A.
Chen Liang-Yun
Diao Jie
Applied Materials Inc.
Patterson & Sheridan
Thomas David B
LandOfFree
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