Condenser optic with sacrificial reflective surface

Details Condenser optic with sacrificial reflective surface Condenser optic with sacrificial reflective surface

2006-07-25

2006-07-25

Amari, Alessandro (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

Reexamination Certificate

active

07081992

ABSTRACT:
Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.

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Patent Abstracts of Japan, Jan. 14, 2003, vol. 2003 No. 1.

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