Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2006-07-25
2006-07-25
Amari, Alessandro (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
Reexamination Certificate
active
07081992
ABSTRACT:
Employing collector optics that have a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics are normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.
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Patent Abstracts of Japan, Jan. 14, 2003, vol. 2003 No. 1.
Kubiak Glenn D.
Lee Sang Hun
Tichenor Daniel A.
Amari Alessandro
Cascio Schmoyer & Zervas
EUV LLC
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