4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

EUV LLC

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Apparatus and method for in-situ cleaning of resist...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Apparatus for generating partially coherent radiation

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Apparatus for generating partially coherent radiation

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Apparatus for in situ cleaning of carbon contaminated surfaces

Cleaning and liquid contact with solids – Semiconductor wafer
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Capillary discharge source

X-ray or gamma ray systems or devices – Source
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