4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Daniel A. Tichenor

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Compensation of flare-induced CD changes EUVL

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Condenser optic with sacrificial reflective surface

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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Condenser optic with sacrificial reflective surface

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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Diffraction spectral filter for use in extreme-UV...

Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path
Reexamination Certificate

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Extreme ultraviolet lithography machine

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Profile ID: LFUS-PAI-P-908105

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