Computer program products for measuring critical dimensions...

Details Computer program products for measuring critical dimensions... Computer program products for measuring critical dimensions...

2006-06-27

2008-12-23

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000

Reexamination Certificate

active

07468512

ABSTRACT:
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection pattern. A determination is made as to whether the inspection pattern is defective by comparing the scanning electron microscope picture of the inspection pattern to a scanning electron microscope picture of a sample pattern, and by comparing the scanning electron microscope secondary electron signal profile of the inspection pattern to a scanning electron microscope secondary electron signal profile of a sample pattern.

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