4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Kyung-Ho Jung

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Apparatus and method for measuring each thickness of a...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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Computer program products for measuring critical dimensions...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Methods and systems for measuring critical dimensions of...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Methods, systems and computer program products for measuring...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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