4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Kyu-tae Na

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Compositions including perhydro-polysilazane used in a...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Compositions including perhydro-polysilazane used in a...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From silicon reactant having at least one...
Reexamination Certificate

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Methods of filling trenches using high-density plasma...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods of filling trenches using high-density plasma...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Solid acid catalyst for paraffin conversion and process for para

Catalyst – solid sorbent – or support therefor: product or process – Catalyst or precursor therefor – Phosphorus or compound containing same
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