Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-11-20
2007-11-20
Font, Frank G. (Department: 2883)
Radiant energy
Inspection of solids or liquids by charged particles
C250S310000, C250S3960ML, C250S492200, C250S492300
Reexamination Certificate
active
11295801
ABSTRACT:
The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterized in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said output orifice.
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Benas-Sayag Gérard
Bouchet Patrick
Corbin Antoine
Sudraud Pierre
Bach Joseph
Credence Systems Corporation
El-Shammaa Mary
Font Frank G.
Sughrue & Mion, PLLC
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