4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Patrick Bouchet

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Column simultaneously focusing a particle beam and an...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Column simultaneously focusing a particle beam and an...

Radiant energy – Inspection of solids or liquids by charged particles
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Column simultaneously focusing a partilce beam and an...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2934522

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