Coating for aluminum component

Details Coating for aluminum component Coating for aluminum component

2008-01-29

2008-01-29

McNeil, Jennifer C. (Department: 1775)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S575000, C427S576000, C427S252000, C427S255260, C427S383300

Reexamination Certificate

active

10910096

ABSTRACT:
A coated aluminum component for a substrate processing chamber comprises an aluminum component having a surface; a first aluminum oxide layer formed on the surface of the aluminum component, the aluminum oxide layer having a surface comprising penetrating surface features; and a second aluminum oxide layer on the first aluminum oxide layer, the second aluminum oxide layer substantially completely filling the penetrating surface features of the first aluminum oxide layer. A method of forming the coated aluminum component is also described.

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