Clog-resistant gas delivery system

Details Clog-resistant gas delivery system Clog-resistant gas delivery system

2007-03-20

2007-03-20

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S726000, C118S663000, C118S666000, C118S692000, C118S696000, C118S697000

Reexamination Certificate

active

10222398

ABSTRACT:
Processing gases reactive with each other are provided in parallel to a processing chamber through separate delivery lines including mass flow controllers devoted to each line. The parallel delivery lines meet in a mixing manifold located proximate to the processing chamber and relatively far downstream from the mass flow controllers and other flow-constricting components of the gas delivery system. The continuous high flow of gas provided by the devoted mass flow controllers may maintain a sufficiently high pressures on the delivery lines to prevent partial clogging from leading to a further drop in pressure and complete obstruction of the delivery line.

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PDC, Engineering Information for PDC Butterfly Valves, Process Development & Control, Inc. Product Catalogue, http://www.pdcvalve.com/products.html.

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