Stock material or miscellaneous articles – Hollow or container type article – Glass – ceramic – or sintered – fused – fired – or calcined metal...
Reexamination Certificate
2005-08-23
2005-08-23
Pyon, Harold (Department: 1772)
Stock material or miscellaneous articles
Hollow or container type article
Glass, ceramic, or sintered, fused, fired, or calcined metal...
C428S034400, C428S426000, C428S432000, C156S345300, C156S345350, C156S914000, C156S916000, C204S298310, C118S7230VE, C118S7230AN
Reexamination Certificate
active
06933025
ABSTRACT:
A component for a substrate processing chamber has a structure composed of aluminum oxide. The structure has a roughened surface having a roughness average of from about 150 to about 450 microinches. A plasma sprayed ceramic coating of aluminum oxide is deposited on the roughened surface of the structure. The component may be a dome shaped ceiling of the chamber.
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Clawson Daniel Owen
Lin Shyh-Nung
Menzie Mark D.
Mori Glen T.
Sharp Lolita L.
Applied Materials Inc.
Bruenjes Chris
Janah & Associates
Pyon Harold
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