4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Tokyo Electoron Limited

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Ceramic electrostatic chuck with built-in heater

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Ceramic electrostatic chuck with built-in heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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