Ceramic coated metallic insulator particularly useful in a plasm

Details Ceramic coated metallic insulator particularly useful in a plasm Ceramic coated metallic insulator particularly useful in a plasm

1997-09-29

1999-03-09

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429831, 20429806, 20429814, 156345, 118715, 118720, C23C 1434, C23C 1604

Patent

active

058795235

ABSTRACT:
A insulating part for use in a plasma reactor, particularly as a support for an electrically floating shield in a plasma sputtering reactor. The insulating part is composed of a metallic base and a partial surface covering of a ceramic insulator, such as alumina. Preferably the ceramic coating is deposited by thermal spraying. The insulating part can be easily affixed to other metal parts in the chamber by use of fastening means such as screws applied to the uncoated portions of the part. When the insulating part is used as an isolator to support but electrically isolate a second metal part, the second metal part may rest on the ceramic coating with the insulating part screwed to the chamber wall or other metal support member.

REFERENCES:
patent: 4419201 (1983-12-01), Levinstein et al.
Lech Pawlowski, The Science and Engineering of Thermal Spray Coating, 1995, pp. 28-52.

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