4. Abrading
  5. Precision device or process - or with condition responsive...
  6. With indicating

Ming-Kuei Tseng

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Carrier head with a substrate sensor

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Carrier head with a substrate sensor

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Carrier head with edge load retaining ring

Abrading – Work holder – Work rotating
Reexamination Certificate

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Carrier head with gimbal mechanism

Abrading – Machine – Rotary tool
Reexamination Certificate

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Magnetically secured retaining ring

Abrading – Machine – Rotary tool
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2510040

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