Bump and fabricating process thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S613000, C438S617000

Reexamination Certificate

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06864168

ABSTRACT:
A bump structure on a contact pad and a fabricating process thereof. The bump comprises an under-ball-metallurgy layer, a bonding mass and a welding lump. The under-ball-metallurgy layer is formed over the contact pad and the bonding mass is formed over the under-ball-metallurgy layer by conducting a pressure bonding process. The bonding mass having a thickness between 4 to 10 μm is made from a material such as copper. The welding lump is formed over the bonding mass such that a sidewall of the bonding mass is also enclosed.

REFERENCES:
patent: 5059553 (1991-10-01), Berndlmaier et al.
patent: 5937320 (1999-08-01), Andricacos et al.
patent: 6049130 (2000-04-01), Hosomi et al.
patent: 6586322 (2003-07-01), Chiu et al.
patent: 6593220 (2003-07-01), Yu et al.

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