4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Yoshitaka Amano

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Beam deflecting method, beam deflector for scanning, ion...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam processing apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Ion beam processing method and apparatus therefor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2328985

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