4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Electron or ion source

Sumitomo Eaton Nova Corporation

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Beam deflecting method, beam deflector for scanning, ion...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Detection method of coating film thickness and ion...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Ion beam charge neutralizer and method therefor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Ion beam mass separation filter, mass separation method...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Ion beam processing method and apparatus therefor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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